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Descrizione
Simplify the preparation of calibration wafers with Thermo Scientific™ SURF-CAL™ Particle Size Standards, for calibration and maintenance of Scanning Surface Inspection Systems (SSIS). Available particle sizes correspond to the calibration point sizes required by instrument manufacturers.
- Available sizes are considered to be critical sizing nodes as defined by the International Technology Roadmap for Semiconductors (ITRS).
- By depositing SURF-CAL™ NIST™ traceable polystyrene latex spheres (PSL) on specially selected wafers, you can perform periodic calibration checks and compare your scanner with scanners at other locations.
- You can also assess the performance of your SSIS at critical stages in the manufacturing process.
- All products are suspended in deionized, filtered water in 50mL bottles at a concentration of 3 × 108 particles per mL.
Note:
Products PD1100 and smaller are also available at 1010 particles per mL for applications using the aid of a Differential Mobility Analyzer (DMA) or other size exclusionary techniques.
Specifica
Specifica
| Additivo | None |
| Concentrazione | 3 x 108 particles/mL |
| Content And Storage | Unless otherwise stated, refrigerate (2° to 8°C) product when not in use but do not freeze. Store upright and keep bottle tightly sealed. Mix product with gentle inversion by hand or vortex mixer. |
| Contenuto | Polystyrene microspheres in deionized, filtered water |
| Descrizione | Particles for calibration and maintenance of Scanning Surface Inspection Systems (SSIS) |
| Colore | White or Colorless |
| Da utilizzare con (applicazione) | SSIS Calibration and Maintenance |
| Materiale | Polistirene |
| Product Type | Size Standard Particles |
| Include | Certificato di calibrazione e tracciabilità NIST |
| Vedi altri risultati |
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